Interferometry: 2D Maps with analysis
Measurement Wavelength: 632,8nm
Standard-Procedure:
- Sample Diameter: ≤ 450mm,
rectangular plates accordingly smaller - Sample Thickness: 22mm - 400mm
- CA-Diameter: ≤ 430mm
rectangular plates accordingly smaller - Accuracy: 2σ = 0,3 ppm
Polished Plate Technique
- Sample Diameter: 135mm - 345 mm
- Sample Thickness: 20 mm - 80 mm
- CA Diameter:130 mm - 310 mm
- Surface Quality: polished better than lambda / 2,
no short term aberrations,
tilt of about 4 arc minutes - Accuracy: 2σ = 0,05 ppm
Stiching-Technique
- Sampe Diameter: ≤ 650 mm x 650mm
- Sample Thickness: 20 mm - 240 mm
- CA Diameter: ≤ 610 mm x 610mm
- Accuracy: 2σ = 1 ppm
